Today, we bring you a detailed explanation of the prefix and suffix of bearings used in semiconductor manufacturing equipment. There are several types of bearings used in semiconductor manufacturing equipment. One is vacuum bearings, such as 5MG-SEB08J1ZZ1C3/0G. The other is ultra clean bearings, such as MT2-SEB08J1ZZ1C3/0G. The third is long-life ultra clean bearings, such as MT2-5PT-SEB08J1ZZ1C3/0G. The fourth is low particle grease bearings, such as SEB08J1ZZ1C3/L635QMP. The fifth is low particle grease bearings for vacuum environments, such as SEB08J1ZZ1C3/LX23Q67.

5 in the vacuum bearing 5MG represents the part code of the solid lubricant film, 5 represents the ball, if 2, represents the inner and outer rings, MG represents the solid lubricant code, MG represents the silver plated bearing, in addition to MM (molybdenum disulfide coated bearing) and MN (lead plated bearing);

MT2-5PT in long-life ultra clean bearings represents long-life ultra clean bearings. If it is only MT2, it represents long-life ultra clean bearings. If there is no prefix, it represents grease lubricated bearings, and the grease model is at the end of the bearing code;

J1 is the cage code, which is austenitic stainless steel cage, in addition to T3 (PTFE resin cage) and L9 (lead copper alloy cage);

/0G is the code name for lubricating grease, representing solid lubricating grease. In addition, there are also/L635 (low particle lubricating grease),/LX23 (low particle fluorine lubricating grease), etc.

The final code QMP or Q67 for low particle lubricating grease bearings represents the amount of lubricating grease filled. QMP is the identification method for NTN, representing the amount of lubricating grease filled from QM-QP, which is 25% -32.5%. In addition, there are more than ten types such as QD (5% -10%), QE (7.5-12.5), etc. Q67 is the identification method for SNR, which represents 67% of lubricating grease filled.